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A Thermopile Detector Based on Micro-Bridges for Heat Transfer
A thermopile detector with their thermocouples distributed in micro-bridges is designed and investigated in this work. The thermopile detector consists of 16 pairs of n-poly-Si/p-poly-Si thermocouples, which are fabricated using a low-cost, high-throughput CMOS process. The micro-bridges are realize...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8708090/ https://www.ncbi.nlm.nih.gov/pubmed/34945404 http://dx.doi.org/10.3390/mi12121554 |
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author | Zhou, Na Ding, Xuefeng Li, Hongbo Ni, Yue Pu, Yonglong Mao, Haiyang |
author_facet | Zhou, Na Ding, Xuefeng Li, Hongbo Ni, Yue Pu, Yonglong Mao, Haiyang |
author_sort | Zhou, Na |
collection | PubMed |
description | A thermopile detector with their thermocouples distributed in micro-bridges is designed and investigated in this work. The thermopile detector consists of 16 pairs of n-poly-Si/p-poly-Si thermocouples, which are fabricated using a low-cost, high-throughput CMOS process. The micro-bridges are realized by forming micro trenches at the front side first and then releasing the silicon substrate at the back side. Compared with a thermopile device using a continuous membrane, the micro-bridge-based one can achieve an improvement of the output voltage by 13.8% due to a higher temperature difference between the hot and cold junctions as there is a decrease in thermal conduction loss in the partially hollowed structure. This technique provides an effective way for developing high-performance thermopile detectors and other thermal devices. |
format | Online Article Text |
id | pubmed-8708090 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-87080902021-12-25 A Thermopile Detector Based on Micro-Bridges for Heat Transfer Zhou, Na Ding, Xuefeng Li, Hongbo Ni, Yue Pu, Yonglong Mao, Haiyang Micromachines (Basel) Article A thermopile detector with their thermocouples distributed in micro-bridges is designed and investigated in this work. The thermopile detector consists of 16 pairs of n-poly-Si/p-poly-Si thermocouples, which are fabricated using a low-cost, high-throughput CMOS process. The micro-bridges are realized by forming micro trenches at the front side first and then releasing the silicon substrate at the back side. Compared with a thermopile device using a continuous membrane, the micro-bridge-based one can achieve an improvement of the output voltage by 13.8% due to a higher temperature difference between the hot and cold junctions as there is a decrease in thermal conduction loss in the partially hollowed structure. This technique provides an effective way for developing high-performance thermopile detectors and other thermal devices. MDPI 2021-12-13 /pmc/articles/PMC8708090/ /pubmed/34945404 http://dx.doi.org/10.3390/mi12121554 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Zhou, Na Ding, Xuefeng Li, Hongbo Ni, Yue Pu, Yonglong Mao, Haiyang A Thermopile Detector Based on Micro-Bridges for Heat Transfer |
title | A Thermopile Detector Based on Micro-Bridges for Heat Transfer |
title_full | A Thermopile Detector Based on Micro-Bridges for Heat Transfer |
title_fullStr | A Thermopile Detector Based on Micro-Bridges for Heat Transfer |
title_full_unstemmed | A Thermopile Detector Based on Micro-Bridges for Heat Transfer |
title_short | A Thermopile Detector Based on Micro-Bridges for Heat Transfer |
title_sort | thermopile detector based on micro-bridges for heat transfer |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8708090/ https://www.ncbi.nlm.nih.gov/pubmed/34945404 http://dx.doi.org/10.3390/mi12121554 |
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