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A Thermopile Detector Based on Micro-Bridges for Heat Transfer

A thermopile detector with their thermocouples distributed in micro-bridges is designed and investigated in this work. The thermopile detector consists of 16 pairs of n-poly-Si/p-poly-Si thermocouples, which are fabricated using a low-cost, high-throughput CMOS process. The micro-bridges are realize...

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Detalles Bibliográficos
Autores principales: Zhou, Na, Ding, Xuefeng, Li, Hongbo, Ni, Yue, Pu, Yonglong, Mao, Haiyang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8708090/
https://www.ncbi.nlm.nih.gov/pubmed/34945404
http://dx.doi.org/10.3390/mi12121554
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author Zhou, Na
Ding, Xuefeng
Li, Hongbo
Ni, Yue
Pu, Yonglong
Mao, Haiyang
author_facet Zhou, Na
Ding, Xuefeng
Li, Hongbo
Ni, Yue
Pu, Yonglong
Mao, Haiyang
author_sort Zhou, Na
collection PubMed
description A thermopile detector with their thermocouples distributed in micro-bridges is designed and investigated in this work. The thermopile detector consists of 16 pairs of n-poly-Si/p-poly-Si thermocouples, which are fabricated using a low-cost, high-throughput CMOS process. The micro-bridges are realized by forming micro trenches at the front side first and then releasing the silicon substrate at the back side. Compared with a thermopile device using a continuous membrane, the micro-bridge-based one can achieve an improvement of the output voltage by 13.8% due to a higher temperature difference between the hot and cold junctions as there is a decrease in thermal conduction loss in the partially hollowed structure. This technique provides an effective way for developing high-performance thermopile detectors and other thermal devices.
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spelling pubmed-87080902021-12-25 A Thermopile Detector Based on Micro-Bridges for Heat Transfer Zhou, Na Ding, Xuefeng Li, Hongbo Ni, Yue Pu, Yonglong Mao, Haiyang Micromachines (Basel) Article A thermopile detector with their thermocouples distributed in micro-bridges is designed and investigated in this work. The thermopile detector consists of 16 pairs of n-poly-Si/p-poly-Si thermocouples, which are fabricated using a low-cost, high-throughput CMOS process. The micro-bridges are realized by forming micro trenches at the front side first and then releasing the silicon substrate at the back side. Compared with a thermopile device using a continuous membrane, the micro-bridge-based one can achieve an improvement of the output voltage by 13.8% due to a higher temperature difference between the hot and cold junctions as there is a decrease in thermal conduction loss in the partially hollowed structure. This technique provides an effective way for developing high-performance thermopile detectors and other thermal devices. MDPI 2021-12-13 /pmc/articles/PMC8708090/ /pubmed/34945404 http://dx.doi.org/10.3390/mi12121554 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Zhou, Na
Ding, Xuefeng
Li, Hongbo
Ni, Yue
Pu, Yonglong
Mao, Haiyang
A Thermopile Detector Based on Micro-Bridges for Heat Transfer
title A Thermopile Detector Based on Micro-Bridges for Heat Transfer
title_full A Thermopile Detector Based on Micro-Bridges for Heat Transfer
title_fullStr A Thermopile Detector Based on Micro-Bridges for Heat Transfer
title_full_unstemmed A Thermopile Detector Based on Micro-Bridges for Heat Transfer
title_short A Thermopile Detector Based on Micro-Bridges for Heat Transfer
title_sort thermopile detector based on micro-bridges for heat transfer
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8708090/
https://www.ncbi.nlm.nih.gov/pubmed/34945404
http://dx.doi.org/10.3390/mi12121554
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