SiGe/Si Multi-Quantum-Well Micro-Bolometer Array Design and Fabrication with Heterogeneous Integration

The micro-bolometer is important in the field of infrared imaging, although improvements in its performance have been limited by traditional materials. SiGe/Si multi-quantum-well materials (SiGe/Si MQWs) are novelty thermal-sensitive materials with a significantly high TCR and a comparably low 1/f n...

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Detalles Bibliográficos
Autores principales: Fang, Zhong, He, Yong, Chen, Zhequan, Shi, Yunlei, Jiao, Junjie, Pan, Xuchao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8708847/
https://www.ncbi.nlm.nih.gov/pubmed/34945403
http://dx.doi.org/10.3390/mi12121553

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8708847/
https://www.ncbi.nlm.nih.gov/pubmed/34945403
http://dx.doi.org/10.3390/mi12121553

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