Adaptive Notch Filter for Piezo-Actuated Nanopositioning System via Position and Online Estimate Dual-Mode

Due to the excellent advantages of high speed, high precision, and driving force, piezoelectric actuators nanopositioning systems have been widely used in various micro/nanomachining fields. However, the inherent resonance dynamic of the nanopositioning system generated by the flexure-hinge greatly...

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Detalles Bibliográficos
Autores principales: Huang, Chengsi, Li, Hongcheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8709153/
https://www.ncbi.nlm.nih.gov/pubmed/34945375
http://dx.doi.org/10.3390/mi12121525

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8709153/
https://www.ncbi.nlm.nih.gov/pubmed/34945375
http://dx.doi.org/10.3390/mi12121525

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