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Adaptive Notch Filter for Piezo-Actuated Nanopositioning System via Position and Online Estimate Dual-Mode
Due to the excellent advantages of high speed, high precision, and driving force, piezoelectric actuators nanopositioning systems have been widely used in various micro/nanomachining fields. However, the inherent resonance dynamic of the nanopositioning system generated by the flexure-hinge greatly...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2021
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8709153/ https://www.ncbi.nlm.nih.gov/pubmed/34945375 http://dx.doi.org/10.3390/mi12121525 |