Sub-25 nm Inorganic and Dielectric Nanopattern Arrays on Substrates: A Block Copolymer-Assisted Lithography

[Image: see text] A range of well-ordered inorganic (antimony, tin, and tungsten oxide) and dielectric (silica, alumina, and hafnia) nanoparticles and nanowire array patterns are created on substrates by a low-cost block copolymer (BCP) approach. A cylindrical-phase PS-b-PEO BCP is used as a templat...

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Detalles Bibliográficos
Autores principales: Ghoshal, Tandra, Prochukhan, Nadezda, Morris, Michael A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2021
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8717533/
https://www.ncbi.nlm.nih.gov/pubmed/34984304
http://dx.doi.org/10.1021/acsomega.1c05124

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8717533/
https://www.ncbi.nlm.nih.gov/pubmed/34984304
http://dx.doi.org/10.1021/acsomega.1c05124

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