Investigation on Transparent, Conductive ZnO:Al Films Deposited by Atomic Layer Deposition Process

Transparent electrodes are a core component for transparent electron devices, photoelectric devices, and advanced displays. In this work, we fabricate fully-transparent, highly-conductive Al-doped ZnO (AZO) films using an atomic layer deposition (ALD) system method of repeatedly stacking ZnO and Al(...

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Detalles Bibliográficos
Autores principales: Zhao, Kai, Xie, Jingye, Zhao, Yudi, Han, Dedong, Wang, Yi, Liu, Bin, Dong, Junchen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8746340/
https://www.ncbi.nlm.nih.gov/pubmed/35010122
http://dx.doi.org/10.3390/nano12010172

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8746340/
https://www.ncbi.nlm.nih.gov/pubmed/35010122
http://dx.doi.org/10.3390/nano12010172

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