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Investigation on Transparent, Conductive ZnO:Al Films Deposited by Atomic Layer Deposition Process

Transparent electrodes are a core component for transparent electron devices, photoelectric devices, and advanced displays. In this work, we fabricate fully-transparent, highly-conductive Al-doped ZnO (AZO) films using an atomic layer deposition (ALD) system method of repeatedly stacking ZnO and Al(...

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Detalles Bibliográficos
Autores principales:	Zhao, Kai, Xie, Jingye, Zhao, Yudi, Han, Dedong, Wang, Yi, Liu, Bin, Dong, Junchen
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8746340/ https://www.ncbi.nlm.nih.gov/pubmed/35010122 http://dx.doi.org/10.3390/nano12010172

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