Quantification of STEM Images in High Resolution SEM for Segmented and Pixelated Detectors

The segmented semiconductor detectors for transmitted electrons in ultrahigh resolution scanning electron microscopes allow observing samples in various imaging modes. Typically, two standard modes of objective lens, with and without a magnetic field, differ by their resolution. If the beam decelera...

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Detalles Bibliográficos
Autores principales: Konvalina, Ivo, Paták, Aleš, Zouhar, Martin, Müllerová, Ilona, Fořt, Tomáš, Unčovský, Marek, Materna Mikmeková, Eliška
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8746443/
https://www.ncbi.nlm.nih.gov/pubmed/35010021
http://dx.doi.org/10.3390/nano12010071

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8746443/
https://www.ncbi.nlm.nih.gov/pubmed/35010021
http://dx.doi.org/10.3390/nano12010071

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