Cargando…
Quantification of STEM Images in High Resolution SEM for Segmented and Pixelated Detectors
The segmented semiconductor detectors for transmitted electrons in ultrahigh resolution scanning electron microscopes allow observing samples in various imaging modes. Typically, two standard modes of objective lens, with and without a magnetic field, differ by their resolution. If the beam decelera...
Autores principales: | , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8746443/ https://www.ncbi.nlm.nih.gov/pubmed/35010021 http://dx.doi.org/10.3390/nano12010071 |
_version_ | 1784630587153186816 |
---|---|
author | Konvalina, Ivo Paták, Aleš Zouhar, Martin Müllerová, Ilona Fořt, Tomáš Unčovský, Marek Materna Mikmeková, Eliška |
author_facet | Konvalina, Ivo Paták, Aleš Zouhar, Martin Müllerová, Ilona Fořt, Tomáš Unčovský, Marek Materna Mikmeková, Eliška |
author_sort | Konvalina, Ivo |
collection | PubMed |
description | The segmented semiconductor detectors for transmitted electrons in ultrahigh resolution scanning electron microscopes allow observing samples in various imaging modes. Typically, two standard modes of objective lens, with and without a magnetic field, differ by their resolution. If the beam deceleration mode is selected, then an electrostatic field around the sample is added. The trajectories of transmitted electrons are influenced by the fields below the sample. The goal of this paper is a quantification of measured images and theoretical study of the capability of the detector to collect signal electrons by its individual segments. Comparison of measured and ray-traced simulated data were difficult in the past. This motivated us to present a new method that enables better comparison of the two datasets at the cost of additional measurements, so-called calibration curves. Furthermore, we also analyze the measurements acquired using 2D pixel array detector (PAD) that provide a more detailed angular profile. We demonstrate that the radial profiles of STEM and/or 2D-PAD data are sensitive to material composition. Moreover, scattering processes are affected by thickness of the sample as well. Hence, comparing the two experimental and simulation data can help to estimate composition or the thickness of the sample. |
format | Online Article Text |
id | pubmed-8746443 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-87464432022-01-11 Quantification of STEM Images in High Resolution SEM for Segmented and Pixelated Detectors Konvalina, Ivo Paták, Aleš Zouhar, Martin Müllerová, Ilona Fořt, Tomáš Unčovský, Marek Materna Mikmeková, Eliška Nanomaterials (Basel) Article The segmented semiconductor detectors for transmitted electrons in ultrahigh resolution scanning electron microscopes allow observing samples in various imaging modes. Typically, two standard modes of objective lens, with and without a magnetic field, differ by their resolution. If the beam deceleration mode is selected, then an electrostatic field around the sample is added. The trajectories of transmitted electrons are influenced by the fields below the sample. The goal of this paper is a quantification of measured images and theoretical study of the capability of the detector to collect signal electrons by its individual segments. Comparison of measured and ray-traced simulated data were difficult in the past. This motivated us to present a new method that enables better comparison of the two datasets at the cost of additional measurements, so-called calibration curves. Furthermore, we also analyze the measurements acquired using 2D pixel array detector (PAD) that provide a more detailed angular profile. We demonstrate that the radial profiles of STEM and/or 2D-PAD data are sensitive to material composition. Moreover, scattering processes are affected by thickness of the sample as well. Hence, comparing the two experimental and simulation data can help to estimate composition or the thickness of the sample. MDPI 2021-12-28 /pmc/articles/PMC8746443/ /pubmed/35010021 http://dx.doi.org/10.3390/nano12010071 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Konvalina, Ivo Paták, Aleš Zouhar, Martin Müllerová, Ilona Fořt, Tomáš Unčovský, Marek Materna Mikmeková, Eliška Quantification of STEM Images in High Resolution SEM for Segmented and Pixelated Detectors |
title | Quantification of STEM Images in High Resolution SEM for Segmented and Pixelated Detectors |
title_full | Quantification of STEM Images in High Resolution SEM for Segmented and Pixelated Detectors |
title_fullStr | Quantification of STEM Images in High Resolution SEM for Segmented and Pixelated Detectors |
title_full_unstemmed | Quantification of STEM Images in High Resolution SEM for Segmented and Pixelated Detectors |
title_short | Quantification of STEM Images in High Resolution SEM for Segmented and Pixelated Detectors |
title_sort | quantification of stem images in high resolution sem for segmented and pixelated detectors |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8746443/ https://www.ncbi.nlm.nih.gov/pubmed/35010021 http://dx.doi.org/10.3390/nano12010071 |
work_keys_str_mv | AT konvalinaivo quantificationofstemimagesinhighresolutionsemforsegmentedandpixelateddetectors AT patakales quantificationofstemimagesinhighresolutionsemforsegmentedandpixelateddetectors AT zouharmartin quantificationofstemimagesinhighresolutionsemforsegmentedandpixelateddetectors AT mullerovailona quantificationofstemimagesinhighresolutionsemforsegmentedandpixelateddetectors AT forttomas quantificationofstemimagesinhighresolutionsemforsegmentedandpixelateddetectors AT uncovskymarek quantificationofstemimagesinhighresolutionsemforsegmentedandpixelateddetectors AT maternamikmekovaeliska quantificationofstemimagesinhighresolutionsemforsegmentedandpixelateddetectors |