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Synthesis of Atomically Thin h-BN Layers Using BCl(3) and NH(3) by Sequential-Pulsed Chemical Vapor Deposition on Cu Foil
The chemical vapor deposition of hexagonal boron nitride layers from BCl(3) and NH(3) is highly beneficial for scalable synthesis with high controllability, yet multiple challenges such as corrosive reaction or by-product formation have hindered its successful demonstration. Here, we report the synt...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2021
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8746830/ https://www.ncbi.nlm.nih.gov/pubmed/35010030 http://dx.doi.org/10.3390/nano12010080 |