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Synthesis of Atomically Thin h-BN Layers Using BCl(3) and NH(3) by Sequential-Pulsed Chemical Vapor Deposition on Cu Foil

The chemical vapor deposition of hexagonal boron nitride layers from BCl(3) and NH(3) is highly beneficial for scalable synthesis with high controllability, yet multiple challenges such as corrosive reaction or by-product formation have hindered its successful demonstration. Here, we report the synt...

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Detalles Bibliográficos
Autores principales:	Oh, Hongseok, Yi, Gyu-Chul
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Communication
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8746830/ https://www.ncbi.nlm.nih.gov/pubmed/35010030 http://dx.doi.org/10.3390/nano12010080

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