Quality factor control of mechanical resonators using variable phononic bandgap on periodic microstructures

The quality factor (Q-factor) is an important parameter for mechanical resonant sensors, and the optimal values depend on its application. Therefore, Q-factor control is essential for microelectromechanical systems (MEMS). Conventional methods have some restrictions, such as additional and complicat...

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Detalles Bibliográficos
Autores principales: Inomata, Naoki, Tonsho, Yuka, Ono, Takahito
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8748515/
https://www.ncbi.nlm.nih.gov/pubmed/35013538
http://dx.doi.org/10.1038/s41598-021-04459-2

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8748515/
https://www.ncbi.nlm.nih.gov/pubmed/35013538
http://dx.doi.org/10.1038/s41598-021-04459-2

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