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Quality factor control of mechanical resonators using variable phononic bandgap on periodic microstructures
The quality factor (Q-factor) is an important parameter for mechanical resonant sensors, and the optimal values depend on its application. Therefore, Q-factor control is essential for microelectromechanical systems (MEMS). Conventional methods have some restrictions, such as additional and complicat...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8748515/ https://www.ncbi.nlm.nih.gov/pubmed/35013538 http://dx.doi.org/10.1038/s41598-021-04459-2 |