True 3D Nanometrology: 3D-Probing with a Cantilever-Based Sensor

State of the art three-dimensional atomic force microscopes (3D-AFM) cannot measure three spatial dimensions separately from each other. A 3D-AFM-head with true 3D-probing capabilities is presented in this paper. It detects the so-called 3D-Nanoprobes CD-tip displacement with a differential interfer...

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Detalles Bibliográficos
Autores principales: Thiesler, Jan, Ahbe, Thomas, Tutsch, Rainer, Dai, Gaoliang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8749579/
https://www.ncbi.nlm.nih.gov/pubmed/35009855
http://dx.doi.org/10.3390/s22010314

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8749579/
https://www.ncbi.nlm.nih.gov/pubmed/35009855
http://dx.doi.org/10.3390/s22010314

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