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Nanoscale cutting using self-excited microcantilever

The application of self-excitation is proposed to improve the efficiency of the nanoscale cutting procedure based on use of a microcantilever in atomic force microscopy. The microcantilever shape is redesigned so that it can be used to produce vibration amplitudes with sufficient magnitudes to enabl...

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Detalles Bibliográficos
Autores principales: Yang, Rui, Ogura, Ichiro, Jiang, ZhenYan, An, LinJun, Ashida, Kiwamu, Yabuno, Hiroshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8755816/
https://www.ncbi.nlm.nih.gov/pubmed/35022414
http://dx.doi.org/10.1038/s41598-021-04085-y