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Nanoscale cutting using self-excited microcantilever
The application of self-excitation is proposed to improve the efficiency of the nanoscale cutting procedure based on use of a microcantilever in atomic force microscopy. The microcantilever shape is redesigned so that it can be used to produce vibration amplitudes with sufficient magnitudes to enabl...
Autores principales: | Yang, Rui, Ogura, Ichiro, Jiang, ZhenYan, An, LinJun, Ashida, Kiwamu, Yabuno, Hiroshi |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8755816/ https://www.ncbi.nlm.nih.gov/pubmed/35022414 http://dx.doi.org/10.1038/s41598-021-04085-y |
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