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Temperature Dependence of Ultrathin Mixed-Phase Ga(2)O(3) Films Grown on the α-Al(2)O(3) Substrate via Mist-CVD
[Image: see text] Alpha (α)- and beta (β)-phase gallium oxide (Ga(2)O(3)), emerging as ultrawide-band gap semiconductors, have been paid a great deal of attention in optoelectronics and high-performance power semiconductor devices owing to their ultrawide band gap ranging from 4.4 to 5.3 eV. The hot...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2022
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8771688/ https://www.ncbi.nlm.nih.gov/pubmed/35071914 http://dx.doi.org/10.1021/acsomega.1c05859 |