Wafer-Scale Fabrication of Silicon Nanocones via Controlling Catalyst Evolution in All-Wet Metal-Assisted Chemical Etching

[Image: see text] All-wet metal-assisted chemical etching (MACE) is a simple and low-cost method to fabricate one-dimensional Si nanostructures. However, it remains a challenge to fabricate Si nanocones (SiNCs) with this method. Here, we achieved wafer-scale fabrication of SiNC arrays through an all...

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Detalles Bibliográficos
Autores principales: Bian, Chenyu, Zhang, Bingchang, Zhang, Zhenghe, Chen, Hui, Zhang, Dake, Wang, Shaojun, Ye, Jing, He, Le, Jie, Jiansheng, Zhang, Xiaohong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8772306/
https://www.ncbi.nlm.nih.gov/pubmed/35071912
http://dx.doi.org/10.1021/acsomega.1c05790

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8772306/
https://www.ncbi.nlm.nih.gov/pubmed/35071912
http://dx.doi.org/10.1021/acsomega.1c05790

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