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Python-Based Open-Source Electro-Mechanical Co-Optimization System for MEMS Inertial Sensors
The surge in fabrication techniques for micro- and nanodevices gave room to rapid growth in these technologies and a never-ending range of possible applications emerged. These new products significantly improve human life, however, the evolution in the design, simulation and optimization process of...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8777840/ https://www.ncbi.nlm.nih.gov/pubmed/35056166 http://dx.doi.org/10.3390/mi13010001 |