Python-Based Open-Source Electro-Mechanical Co-Optimization System for MEMS Inertial Sensors

The surge in fabrication techniques for micro- and nanodevices gave room to rapid growth in these technologies and a never-ending range of possible applications emerged. These new products significantly improve human life, however, the evolution in the design, simulation and optimization process of...

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Detalles Bibliográficos
Autores principales: Amendoeira Esteves, Rui, Wang, Chen, Kraft, Michael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8777840/
https://www.ncbi.nlm.nih.gov/pubmed/35056166
http://dx.doi.org/10.3390/mi13010001

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8777840/
https://www.ncbi.nlm.nih.gov/pubmed/35056166
http://dx.doi.org/10.3390/mi13010001

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