Estimation of the Young’s Modulus of Nanometer-Thick Films Using Residual Stress-Driven Bilayer Cantilevers

Precise prediction of mechanical behavior of thin films at the nanoscale requires techniques that consider size effects and fabrication-related issues. Here, we propose a test methodology to estimate the Young’s modulus of nanometer-thick films using micromachined bilayer cantilevers. The bilayer ca...

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Detalles Bibliográficos
Autores principales: Velosa-Moncada, Luis A., Raskin, Jean-Pierre, Aguilera-Cortés, Luz Antonio, López-Huerta, Francisco, Herrera-May, Agustín L.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778095/
https://www.ncbi.nlm.nih.gov/pubmed/35055286
http://dx.doi.org/10.3390/nano12020265

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778095/
https://www.ncbi.nlm.nih.gov/pubmed/35055286
http://dx.doi.org/10.3390/nano12020265

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