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Effects of Oxygen Partial Pressure and Substrate Temperature on the Structure and Morphology of Sc and Y Co-Doped ZrO(2) Solid Electrolyte Thin Films Prepared via Pulsed Laser Deposition
Scandium (Sc) and yttrium (Y) co-doped ZrO(2) (ScYSZ) thin films were prepared on a SiO(2)-Si substrate via pulsed laser deposition (PLD) method. In order to obtain good quality thin films with the desired microstructure, various oxygen partial pressures ([Formula: see text] from 0.01 Pa to 10 Pa an...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778154/ https://www.ncbi.nlm.nih.gov/pubmed/35057125 http://dx.doi.org/10.3390/ma15020410 |