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Effects of Oxygen Partial Pressure and Substrate Temperature on the Structure and Morphology of Sc and Y Co-Doped ZrO(2) Solid Electrolyte Thin Films Prepared via Pulsed Laser Deposition

Scandium (Sc) and yttrium (Y) co-doped ZrO(2) (ScYSZ) thin films were prepared on a SiO(2)-Si substrate via pulsed laser deposition (PLD) method. In order to obtain good quality thin films with the desired microstructure, various oxygen partial pressures ([Formula: see text] from 0.01 Pa to 10 Pa an...

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Detalles Bibliográficos
Autores principales: Rabo, Jennet R., Takayanagi, Makoto, Tsuchiya, Takashi, Nakajima, Hideki, Terabe, Kazuya, Cervera, Rinlee Butch M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778154/
https://www.ncbi.nlm.nih.gov/pubmed/35057125
http://dx.doi.org/10.3390/ma15020410