Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors

We present a concept for a wafer-level manufactured photoacoustic transducer, suitable to be used in consumer-grade gas sensors. The transducer consists of an anodically bonded two-layer stack of a blank silicon wafer and an 11 µm membrane, which was wet-etched from a borosilicate wafer. The membran...

Descripción completa

Detalles Bibliográficos
Autores principales: Gassner, Simon, Schaller, Rainer, Eberl, Matthias, von Koblinski, Carsten, Essing, Simon, Ghaderi, Mohammadamir, Schmitt, Katrin, Wöllenstein, Jürgen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778516/
https://www.ncbi.nlm.nih.gov/pubmed/35062646
http://dx.doi.org/10.3390/s22020685

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778516/
https://www.ncbi.nlm.nih.gov/pubmed/35062646
http://dx.doi.org/10.3390/s22020685

Ejemplares similares