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Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors
We present a concept for a wafer-level manufactured photoacoustic transducer, suitable to be used in consumer-grade gas sensors. The transducer consists of an anodically bonded two-layer stack of a blank silicon wafer and an 11 µm membrane, which was wet-etched from a borosilicate wafer. The membran...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778516/ https://www.ncbi.nlm.nih.gov/pubmed/35062646 http://dx.doi.org/10.3390/s22020685 |