An Experimental and Theoretical Study of Impact of Device Parameters on Performance of AlN/Sapphire-Based SAW Temperature Sensors

The impact of device parameters, including AlN film thickness (h(AlN)), number of interdigital transducers (N(IDT)), and acoustic propagation direction, on the performance of c-plane AlN/sapphire-based SAW temperature sensors with an acoustic wavelength (λ) of 8 μm, was investigated. The results sho...

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Detalles Bibliográficos
Autores principales: Lv, Hongrui, Huang, Yinglong, Ai, Yujie, Liu, Zhe, Lin, Defeng, Cheng, Zhe, Jia, Lifang, Guo, Bingliang, Dong, Boyu, Zhang, Yun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778675/
https://www.ncbi.nlm.nih.gov/pubmed/35056205
http://dx.doi.org/10.3390/mi13010040

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778675/
https://www.ncbi.nlm.nih.gov/pubmed/35056205
http://dx.doi.org/10.3390/mi13010040

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