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An Experimental and Theoretical Study of Impact of Device Parameters on Performance of AlN/Sapphire-Based SAW Temperature Sensors

The impact of device parameters, including AlN film thickness (h(AlN)), number of interdigital transducers (N(IDT)), and acoustic propagation direction, on the performance of c-plane AlN/sapphire-based SAW temperature sensors with an acoustic wavelength (λ) of 8 μm, was investigated. The results sho...

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Detalles Bibliográficos
Autores principales:	Lv, Hongrui, Huang, Yinglong, Ai, Yujie, Liu, Zhe, Lin, Defeng, Cheng, Zhe, Jia, Lifang, Guo, Bingliang, Dong, Boyu, Zhang, Yun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778675/ https://www.ncbi.nlm.nih.gov/pubmed/35056205 http://dx.doi.org/10.3390/mi13010040

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