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Reducing Threading Dislocations of Single-Crystal Diamond via In Situ Tungsten Incorporation
A lower dislocation density substrate is essential for realizing high performance in single-crystal diamond electronic devices. The in-situ tungsten-incorporated homoepitaxial diamond by introducing tungsten hexacarbonyl has been proposed. A 3 × 3 × 0.5 mm(3) high-pressure, high-temperature (001) di...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778734/ https://www.ncbi.nlm.nih.gov/pubmed/35057162 http://dx.doi.org/10.3390/ma15020444 |