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Piezoelectric MEMS Acoustic Transducer with Electrically-Tunable Resonant Frequency
The paper presents a technique to obtain an electrically-tunable matching between the series and parallel resonant frequencies of a piezoelectric MEMS acoustic transducer to increase the effectiveness of acoustic emission/detection in voltage-mode driving and sensing. The piezoelectric MEMS transduc...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779133/ https://www.ncbi.nlm.nih.gov/pubmed/35056264 http://dx.doi.org/10.3390/mi13010096 |