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Piezoelectric MEMS Acoustic Transducer with Electrically-Tunable Resonant Frequency

The paper presents a technique to obtain an electrically-tunable matching between the series and parallel resonant frequencies of a piezoelectric MEMS acoustic transducer to increase the effectiveness of acoustic emission/detection in voltage-mode driving and sensing. The piezoelectric MEMS transduc...

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Detalles Bibliográficos
Autores principales:	Nastro, Alessandro, Ferrari, Marco, Rufer, Libor, Basrour, Skandar, Ferrari, Vittorio
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779133/ https://www.ncbi.nlm.nih.gov/pubmed/35056264 http://dx.doi.org/10.3390/mi13010096

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