Lead-Free LiNbO(3) Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester

In this paper, we present integrated lead-free energy converters based on a suitable MEMS fabrication process with an embedded layer of LiNbO(3). The fabrication technology has been developed to realize micromachined self-generating transducers to convert kinetic energy into electrical energy. The p...

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Detalles Bibliográficos
Autores principales: Barrientos, Gabriel, Clementi, Giacomo, Trigona, Carlo, Ouhabaz, Merieme, Gauthier-Manuel, Ludovic, Belharet, Djaffar, Margueron, Samuel, Bartasyte, Ausrine, Malandrino, Graziella, Baglio, Salvatore
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779148/
https://www.ncbi.nlm.nih.gov/pubmed/35062520
http://dx.doi.org/10.3390/s22020559

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779148/
https://www.ncbi.nlm.nih.gov/pubmed/35062520
http://dx.doi.org/10.3390/s22020559

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