Passivated Porous Silicon Membranes and Their Application to Optical Biosensing

A robust fabrication method for stable mesoporous silicon membranes using standard microfabrication techniques is presented. The porous silicon membranes were passivated through the atomic layer deposition of different metal oxides, namely aluminium oxide Al(2)O(3), hafnium oxide HfO(2) and titanium...

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Detalles Bibliográficos
Autores principales: Whyte Ferreira, Clara, Vercauteren, Roselien, Francis, Laurent A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779296/
https://www.ncbi.nlm.nih.gov/pubmed/35056175
http://dx.doi.org/10.3390/mi13010010

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779296/
https://www.ncbi.nlm.nih.gov/pubmed/35056175
http://dx.doi.org/10.3390/mi13010010

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