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Passivated Porous Silicon Membranes and Their Application to Optical Biosensing
A robust fabrication method for stable mesoporous silicon membranes using standard microfabrication techniques is presented. The porous silicon membranes were passivated through the atomic layer deposition of different metal oxides, namely aluminium oxide Al(2)O(3), hafnium oxide HfO(2) and titanium...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779296/ https://www.ncbi.nlm.nih.gov/pubmed/35056175 http://dx.doi.org/10.3390/mi13010010 |