Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Femtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was propos...

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Detalles Bibliográficos
Autores principales: Wang, Bao-Xu, Qi, Jin-Yong, Lu, Yi-Ming, Zheng, Jia-Xin, Xu, Ying, Liu, Xue-Qing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779314/
https://www.ncbi.nlm.nih.gov/pubmed/35057393
http://dx.doi.org/10.3390/ma15020678

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779314/
https://www.ncbi.nlm.nih.gov/pubmed/35057393
http://dx.doi.org/10.3390/ma15020678

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