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Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Femtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was propos...

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Autores principales: Wang, Bao-Xu, Qi, Jin-Yong, Lu, Yi-Ming, Zheng, Jia-Xin, Xu, Ying, Liu, Xue-Qing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779314/
https://www.ncbi.nlm.nih.gov/pubmed/35057393
http://dx.doi.org/10.3390/ma15020678
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author Wang, Bao-Xu
Qi, Jin-Yong
Lu, Yi-Ming
Zheng, Jia-Xin
Xu, Ying
Liu, Xue-Qing
author_facet Wang, Bao-Xu
Qi, Jin-Yong
Lu, Yi-Ming
Zheng, Jia-Xin
Xu, Ying
Liu, Xue-Qing
author_sort Wang, Bao-Xu
collection PubMed
description Femtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was proposed to realize micro-optical devices with low roughness on glass. Compared to traditional laser ablation, the fabrication efficiency in this work was improved by one order of magnitude, and the surface roughness was decreased to 15 nm. Using this method, aspherical convex microlenses and spherical concave microlenses that possess excellent focusing and imaging properties are realized on photosensitive glass. The diameter and height of the microlenses were controlled by adjusting the fabrication parameters. These results indicate that the fs-laser-based hybrid method will open new opportunities for fabricating micro-optical components on hard materials.
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spelling pubmed-87793142022-01-22 Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification Wang, Bao-Xu Qi, Jin-Yong Lu, Yi-Ming Zheng, Jia-Xin Xu, Ying Liu, Xue-Qing Materials (Basel) Article Femtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was proposed to realize micro-optical devices with low roughness on glass. Compared to traditional laser ablation, the fabrication efficiency in this work was improved by one order of magnitude, and the surface roughness was decreased to 15 nm. Using this method, aspherical convex microlenses and spherical concave microlenses that possess excellent focusing and imaging properties are realized on photosensitive glass. The diameter and height of the microlenses were controlled by adjusting the fabrication parameters. These results indicate that the fs-laser-based hybrid method will open new opportunities for fabricating micro-optical components on hard materials. MDPI 2022-01-17 /pmc/articles/PMC8779314/ /pubmed/35057393 http://dx.doi.org/10.3390/ma15020678 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Wang, Bao-Xu
Qi, Jin-Yong
Lu, Yi-Ming
Zheng, Jia-Xin
Xu, Ying
Liu, Xue-Qing
Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification
title Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification
title_full Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification
title_fullStr Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification
title_full_unstemmed Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification
title_short Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification
title_sort rapid fabrication of smooth micro-optical components on glass by etching-assisted femtosecond laser modification
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779314/
https://www.ncbi.nlm.nih.gov/pubmed/35057393
http://dx.doi.org/10.3390/ma15020678
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