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Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification
Femtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was propos...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779314/ https://www.ncbi.nlm.nih.gov/pubmed/35057393 http://dx.doi.org/10.3390/ma15020678 |
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author | Wang, Bao-Xu Qi, Jin-Yong Lu, Yi-Ming Zheng, Jia-Xin Xu, Ying Liu, Xue-Qing |
author_facet | Wang, Bao-Xu Qi, Jin-Yong Lu, Yi-Ming Zheng, Jia-Xin Xu, Ying Liu, Xue-Qing |
author_sort | Wang, Bao-Xu |
collection | PubMed |
description | Femtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was proposed to realize micro-optical devices with low roughness on glass. Compared to traditional laser ablation, the fabrication efficiency in this work was improved by one order of magnitude, and the surface roughness was decreased to 15 nm. Using this method, aspherical convex microlenses and spherical concave microlenses that possess excellent focusing and imaging properties are realized on photosensitive glass. The diameter and height of the microlenses were controlled by adjusting the fabrication parameters. These results indicate that the fs-laser-based hybrid method will open new opportunities for fabricating micro-optical components on hard materials. |
format | Online Article Text |
id | pubmed-8779314 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-87793142022-01-22 Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification Wang, Bao-Xu Qi, Jin-Yong Lu, Yi-Ming Zheng, Jia-Xin Xu, Ying Liu, Xue-Qing Materials (Basel) Article Femtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was proposed to realize micro-optical devices with low roughness on glass. Compared to traditional laser ablation, the fabrication efficiency in this work was improved by one order of magnitude, and the surface roughness was decreased to 15 nm. Using this method, aspherical convex microlenses and spherical concave microlenses that possess excellent focusing and imaging properties are realized on photosensitive glass. The diameter and height of the microlenses were controlled by adjusting the fabrication parameters. These results indicate that the fs-laser-based hybrid method will open new opportunities for fabricating micro-optical components on hard materials. MDPI 2022-01-17 /pmc/articles/PMC8779314/ /pubmed/35057393 http://dx.doi.org/10.3390/ma15020678 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Wang, Bao-Xu Qi, Jin-Yong Lu, Yi-Ming Zheng, Jia-Xin Xu, Ying Liu, Xue-Qing Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification |
title | Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification |
title_full | Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification |
title_fullStr | Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification |
title_full_unstemmed | Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification |
title_short | Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification |
title_sort | rapid fabrication of smooth micro-optical components on glass by etching-assisted femtosecond laser modification |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779314/ https://www.ncbi.nlm.nih.gov/pubmed/35057393 http://dx.doi.org/10.3390/ma15020678 |
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