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Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification
Femtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was propos...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779314/ https://www.ncbi.nlm.nih.gov/pubmed/35057393 http://dx.doi.org/10.3390/ma15020678 |