AFM Nanotribomechanical Characterization of Thin Films for MEMS Applications

Nanotribological studies of thin films are needed to develop a fundamental understanding of the phenomena that occur to the interface surfaces that come in contact at the micro and nanoscale and to study the interfacial phenomena that occur in microelectromechanical systems (MEMS/NEMS) and other app...

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Detalles Bibliográficos
Autores principales: Bîrleanu, Corina, Pustan, Marius, Șerdean, Florina, Merie, Violeta
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779540/
https://www.ncbi.nlm.nih.gov/pubmed/35056188
http://dx.doi.org/10.3390/mi13010023

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779540/
https://www.ncbi.nlm.nih.gov/pubmed/35056188
http://dx.doi.org/10.3390/mi13010023

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