A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-Seismometer

We propose a sub-1 Hz resonance frequency MEMS resonator that can be used for seismometers. The low resonance frequency is achieved by an electrically tunable spring with an ultra-small spring constant. Generally, it is difficult to electrically fine-tune the resonance frequency at a near-zero sprin...

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Detalles Bibliográficos
Autores principales: Wu, Jun, Maekoba, Hideyuki, Parent, Arnaud, Ikehashi, Tamio
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779562/
https://www.ncbi.nlm.nih.gov/pubmed/35056228
http://dx.doi.org/10.3390/mi13010063

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779562/
https://www.ncbi.nlm.nih.gov/pubmed/35056228
http://dx.doi.org/10.3390/mi13010063

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