Novel Fabrication Technology for Clamped Micron-Thick Titanium Diaphragms Used for the Packaging of an Implantable MEMS Acoustic Transducer

Micro-Electro-Mechanical Systems (MEMS) acoustic transducers are highly sophisticated devices with high sensing performance, small size, and low power consumption. To be applied in an implantable medical device, they require a customized packaging solution with a protecting shell, usually made from...

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Detalles Bibliográficos
Autores principales: Prochazka, Lukas, Huber, Alexander, Schneider, Michael, Ghafoor, Naureen, Birch, Jens, Pfiffner, Flurin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779576/
https://www.ncbi.nlm.nih.gov/pubmed/35056242
http://dx.doi.org/10.3390/mi13010074

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779576/
https://www.ncbi.nlm.nih.gov/pubmed/35056242
http://dx.doi.org/10.3390/mi13010074

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