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Non-Contact Optical Detection of Foreign Materials Adhered to Color Filter and Thin-Film Transistor

This paper describes the non-contact optical detection of debris material that adheres to the substrates of color filters (CFs) and thin-film transistors (TFTs) by area charge-coupled devices (CCDs) and laser sensors. One of the optical detections is a side-view illumination by an area CCD that emit...

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Detalles Bibliográficos
Autores principales: Tzu, Fu-Ming, Hsu, Shih-Hsien, Chen, Jung-Shun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779804/
https://www.ncbi.nlm.nih.gov/pubmed/35056265
http://dx.doi.org/10.3390/mi13010101