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Non-Contact Optical Detection of Foreign Materials Adhered to Color Filter and Thin-Film Transistor
This paper describes the non-contact optical detection of debris material that adheres to the substrates of color filters (CFs) and thin-film transistors (TFTs) by area charge-coupled devices (CCDs) and laser sensors. One of the optical detections is a side-view illumination by an area CCD that emit...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779804/ https://www.ncbi.nlm.nih.gov/pubmed/35056265 http://dx.doi.org/10.3390/mi13010101 |