Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators

Microelectromechanical systems (MEMS) are the instruments of choice for high-precision manipulation and sensing processes at the microscale. They are, therefore, a subject of interest in many leading industrial and academic research sectors owing to their superior potential in applications requiring...

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Detalles Bibliográficos
Autores principales: Sciberras, Thomas, Demicoli, Marija, Grech, Ivan, Mallia, Bertram, Mollicone, Pierluigi, Sammut, Nicholas
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8781855/
https://www.ncbi.nlm.nih.gov/pubmed/35056172
http://dx.doi.org/10.3390/mi13010008

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8781855/
https://www.ncbi.nlm.nih.gov/pubmed/35056172
http://dx.doi.org/10.3390/mi13010008

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