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Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators
Microelectromechanical systems (MEMS) are the instruments of choice for high-precision manipulation and sensing processes at the microscale. They are, therefore, a subject of interest in many leading industrial and academic research sectors owing to their superior potential in applications requiring...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8781855/ https://www.ncbi.nlm.nih.gov/pubmed/35056172 http://dx.doi.org/10.3390/mi13010008 |