Miniaturized thermal acoustic gas sensor based on a CMOS microhotplate and MEMS microphone

We present a miniaturised thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical properties of the gas. An active sensing eleme...

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Detalles Bibliográficos
Autores principales: Hopper, Richard, Popa, Daniel, Udrea, Florin, Ali, Syed Zeeshan, Stanley-Marbell, Phillip
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8807770/
https://www.ncbi.nlm.nih.gov/pubmed/35105901
http://dx.doi.org/10.1038/s41598-022-05613-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8807770/
https://www.ncbi.nlm.nih.gov/pubmed/35105901
http://dx.doi.org/10.1038/s41598-022-05613-0

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