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Thin films of the [Formula: see text] -quartz [Formula: see text] solid solution
[Formula: see text] with the [Formula: see text] -quartz structure is one of the most popular piezoelectrics. It is widely used in crystal oscillators, bulk acoustic wave (BAW) devices, surface acoustic wave (SAW) devices, and so on. [Formula: see text] can also be crystallized into the [Formula: se...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8821611/ https://www.ncbi.nlm.nih.gov/pubmed/35132092 http://dx.doi.org/10.1038/s41598-022-05595-z |