Low-energy electron interaction and focused electron beam-induced deposition of molybdenum hexacarbonyl (Mo(CO)(6))

Motivated by the potential role of molybdenum in semiconductor materials, we present a combined theoretical and experimental gas-phase study on dissociative electron attachment (DEA) and dissociative ionization (DI) of Mo(CO)(6) in comparison to focused electron beam-induced deposition (FEBID) of th...

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Detalles Bibliográficos
Autores principales: Shih, Po-Yuan, Cipriani, Maicol, Hermanns, Christian Felix, Oster, Jens, Edinger, Klaus, Gölzhäuser, Armin, Ingólfsson, Oddur
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2022
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8822466/
https://www.ncbi.nlm.nih.gov/pubmed/35186652
http://dx.doi.org/10.3762/bjnano.13.13

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8822466/
https://www.ncbi.nlm.nih.gov/pubmed/35186652
http://dx.doi.org/10.3762/bjnano.13.13

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