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A novel method to design and evaluate artificial neural network for thin film thickness measurement traceable to the length standard

The artificial neural networks (ANNs) have been often used for thin-film thickness measurement, whose performance evaluations were only conducted at the level of simple comparisons with the existing analysis methods. However, it is not an easy and simple way to verify the reliability of an ANN based...

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Detalles Bibliográficos
Autores principales: Lee, Joonyoung, Jin, Jonghan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8828747/
https://www.ncbi.nlm.nih.gov/pubmed/35140300
http://dx.doi.org/10.1038/s41598-022-06247-y