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A novel method to design and evaluate artificial neural network for thin film thickness measurement traceable to the length standard
The artificial neural networks (ANNs) have been often used for thin-film thickness measurement, whose performance evaluations were only conducted at the level of simple comparisons with the existing analysis methods. However, it is not an easy and simple way to verify the reliability of an ANN based...
Autores principales: | Lee, Joonyoung, Jin, Jonghan |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8828747/ https://www.ncbi.nlm.nih.gov/pubmed/35140300 http://dx.doi.org/10.1038/s41598-022-06247-y |
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