Dense, single-phase, hard, and stress-free Ti(0.32)Al(0.63)W(0.05)N films grown by magnetron sputtering with dramatically reduced energy consumption

The quest for lowering energy consumption during thin film growth, as by magnetron sputtering, becomes of particular importance in view of sustainable development goals. A recently proposed solution combining high power impulse and direct current magnetron sputtering (HiPIMS/DCMS) relies on the use...

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Detalles Bibliográficos
Autores principales: Li, X., Bakhit, B., Johansson Jõesaar, M. P., Petrov, I., Hultman, L., Greczynski, G.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8828753/
https://www.ncbi.nlm.nih.gov/pubmed/35140271
http://dx.doi.org/10.1038/s41598-022-05975-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8828753/
https://www.ncbi.nlm.nih.gov/pubmed/35140271
http://dx.doi.org/10.1038/s41598-022-05975-5

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