Cargando…

Dense, single-phase, hard, and stress-free Ti(0.32)Al(0.63)W(0.05)N films grown by magnetron sputtering with dramatically reduced energy consumption

The quest for lowering energy consumption during thin film growth, as by magnetron sputtering, becomes of particular importance in view of sustainable development goals. A recently proposed solution combining high power impulse and direct current magnetron sputtering (HiPIMS/DCMS) relies on the use...

Descripción completa

Detalles Bibliográficos
Autores principales:	Li, X., Bakhit, B., Johansson Jõesaar, M. P., Petrov, I., Hultman, L., Greczynski, G.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8828753/ https://www.ncbi.nlm.nih.gov/pubmed/35140271 http://dx.doi.org/10.1038/s41598-022-05975-5

Ejemplares similares

The Optoelectronic Properties of p-Type Cr-Deficient Cu[Cr(0.95−x)Mg(0.05)]O(2) Films Deposited by Reactive Magnetron Sputtering
por: Lin, Song-Sheng, et al.
Publicado: (2020)

Structural Characterization of Al(0.37)In(0.63)N/AlN/p-Si (111) Heterojunctions Grown by RF Sputtering for Solar Cell Applications
por: Núñez-Cascajero, Arántzazu, et al.
Publicado: (2021)

Origin of colossal dielectric permittivity of rutile Ti(0.9)In(0.05)Nb(0.05)O(2): single crystal and polycrystalline
por: Song, Yongli, et al.
Publicado: (2016)

β-Li(0.37)Na(0.63)Fe(MoO(4))(2)
por: Souilem, Amira, et al.
Publicado: (2014)

p < 0.05, < 0.01, < 0.001, < 0.0001, < 0.00001, < 0.000001, or < 0.0000001 …
por: Zhu, Weimo
Publicado: (2016)

2-Amino-5-methylpyridinium picolinate 0.63-hydrate
por: Hemamalini, Madhukar, et al.
Publicado: (2010)

Efficacy of Topical Cyclosporine Nanoemulsion 0.05% Compared with Topical Cyclosporine Emulsion 0.05% and Diquafosol 3% in Dry Eye
por: Park, Chang Hyun, et al.
Publicado: (2019)

Structure and piezo-ferroelectricity relationship study of (K(0.5)Na(0.5))(0.985)La(0.005)NbO(3) epitaxial films deposited on SrTiO(3) by sputtering
por: H´Mŏk, H´Linh, et al.
Publicado: (2017)

Efficacy of 0.05% Chlorhexidine and 0.05% Cetylpyridinium Chloride Mouthwash to Eliminate Living Bacteria on In Situ Collected Biofilms: An In Vitro Study
por: Becker, Kathrin, et al.
Publicado: (2021)

Are Only p-Values Less Than 0.05 Significant? A p-Value Greater Than 0.05 Is Also Significant!
por: Kwak, Sanggyu
Publicado: (2023)

Electrochemical properties of La(0.5)Sr(0.5)Fe(0.95)Mo(0.05)O(3−δ) as cathode materials for IT-SOEC
por: Hou, Yunting, et al.
Publicado: (2021)

0.05 - 100 MHz 4 W amplifier
por: Paoluzzi, M
Publicado: (1997)

Halometasone monohydrate (0.05%) in occupational contact dermatitis
por: Maiti, Rituparna, et al.
Publicado: (2016)

Comparison of the latanoprost 0.005%/timolol 0.5% + brinzolamide 1% versus dorzolamide 1%/timolol 0.5% + latanoprost 0.005%: a 12-week, randomized open-label trial
por: Nakakura, Shunsuke, et al.
Publicado: (2012)

Enhanced Ti(0.84)Ta(0.16)N diffusion barriers, grown by a hybrid sputtering technique with no substrate heating, between Si(001) wafers and Cu overlayers
por: Mühlbacher, Marlene, et al.
Publicado: (2018)

A Primary Dead-Weight Tester for Pressures (0.05–1.0) MPa
por: Jain, Kamlesh, et al.
Publicado: (2003)

Electronic, electrical and thermoelectric properties of Ba(0.95)Ca(0.05)Ti(0.95)Y(0.05)O(2.975) compound: Experimental study and DFT-mBJ calculation
por: Saidi, A., et al.
Publicado: (2023)

Effect of Microwave Sintering on the Properties of 0.95(Ca(0.88)Sr(0.12))TiO(3)–0.05(Bi(0.5)Na(0.5))TiO(3) Ceramics
por: Tian, Lei, et al.
Publicado: (2019)

Efficacy and safety of a switch to latanoprost 0.005% + timolol maleate 0.5% fixed combination eyedrops from latanoprost 0.005% monotherapy
por: Inoue, Kenji, et al.
Publicado: (2012)

$^{57}$Fe Mössbauer study of epitaxial TiN thin film grown on MgO (1 0 0) by magnetron sputtering
por: Qi, B, et al.
Publicado: (2019)

Analogous Anti-Ferroelectricity in Y(2)O(3)-Coated (Pb(0.92)Sr(0.05)La(0.02))(Zr(0.7)Sn(0.25)Ti(0.05))O(3) Ceramics and Their Energy-Storage Performance
por: Fang, Bijun, et al.
Publicado: (2019)

Comparing the antiplaque efficacy of 0.5% Camellia sinensis extract, 0.05% sodium fluoride, and 0.2% chlorhexidine gluconate mouthwash in children
por: Hambire, Chaitali U., et al.
Publicado: (2015)

The Effects of a High Magnetic Field on the Annealing of [(Fe(0.5)Co(0.5))(0.75)B(0.2)Si(0.05)](96)Nb(4) Bulk Metallic Glass
por: Jia, Peng, et al.
Publicado: (2016)

Efficacy of 0.05% epinastine and 0.1% olopatadine for allergic conjunctivitis as seasonal and preseasonal treatment
por: Mizoguchi, Takanori, et al.
Publicado: (2017)

Thermoelectric Properties of Ca(3)Co(2−x)Mn(x)O(6) (x = 0.05, 0.2, 0.5, 0.75, and 1)
por: Kanas, Nikola, et al.
Publicado: (2019)

Efficacy and Safety of Topical Calcipotriol 0.005% Versus Topical Clobetasol 0.05% in the Management of Alopecia Areata: An Intrasubject Pilot Study
por: Molinelli, Elisa, et al.
Publicado: (2020)

Search for new heavy quarks in proton-antiproton collisions at $\sqrt{s}$ = 0.63 TeV
por: Albajar, C, et al.
Publicado: (1990)

Double pomeron exchange studies in p$\overline{p}$ interactions at 0.63 TeV
por: Joyce, D, et al.
Publicado: (1993)

Grain Growth Behavior of 0.95(Na(0.5)Bi(0.5))TiO(3)–0.05BaTiO(3) Controlled by Grain Shape and Second Phase
por: Jeon, Sang-Chae, et al.
Publicado: (2020)

Kinematical tables for two-body decays from 0.05 to 25.0 GeV/c
por: Salmeron, Roberto Aureliano
Publicado: (1963)

Interplay of piezoresponse and magnetic behavior in Bi(0.9)A(0.1)FeO(2.95) (A = Ba, Ca) and Bi(0.9)Ba(0.05)Ca(0.05)FeO(2.95) co-doped ceramics
por: Mangamma, G., et al.
Publicado: (2022)

The effect of topical 0.05% cyclosporine on recurrence following pterygium surgery
por: Turan-Vural, Ece, et al.
Publicado: (2011)

In Vivo Immunotoxicity of SiO2@(Y0.5Gd0.45Eu0.05)2O3 as Dual-Modality Nanoprobes
por: Tian, Xiumei, et al.
Publicado: (2014)

Grain Growth Behavior and Electrical Properties of 0.96(K(0.46−x)Na(0.54−x))Nb(0.95)Sb(0.05)O(3)–0.04Bi(0.5)(Na(0.82)K(0.18))(0.5)ZrO(3) Ceramics
por: Park, Yeon-Ju, et al.
Publicado: (2022)

Comparing the Efficacy of Latanoprost (0.005%), Bimatoprost (0.03%), Travoprost (0.004%), and Timolol (0.5%) in the Treatment of Primary Open Angle Glaucoma
por: Mishra, Deepak, et al.
Publicado: (2014)

Na(3)Co(2)(As(0.52)P(0.48))O(4)(As(0.95)P(0.05))(2)O(7)
por: Ben Smida, Youssef, et al.
Publicado: (2013)

A Randomized Multicenter Study Comparing 0.1%, 0.15%, and 0.3% Sodium Hyaluronate with 0.05% Cyclosporine in the Treatment of Dry Eye
por: Park, Yuli, et al.
Publicado: (2017)

The pyrochlore-type molybdate Pr(1.37)Ca(0.63)Mo(2)O(7)
por: Gall, P., et al.
Publicado: (2008)

Analgesia epidural durante el trabajo de parto con ropivacaína al 0.1%, 0.075% y 0.05%
por: Colmenares Sánchez, María del Pilar
Publicado: (2002)

Distinct domain switching in Nd(0.05)Ce(0.95)CoIn(5) at low and high fields
por: Mazzone, D. G., et al.
Publicado: (2018)

Cannot write session to /tmp/vufind_sessions/sess_furt9uu0d9j4saiqefmej9me4n