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Revealing the Chemical Reaction Properties of a SiHCl(3) Pyrolysis System by the ReaxFF Molecular Dynamics Method

[Image: see text] The pyrolysis kinetics of SiHCl(3) and its reaction mechanism are essential for the chemical vapor deposition process in polysilicon industries. However, due to the high temperature and lack of in situ experimental detection technology, it is difficult to carry out experimental res...

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Detalles Bibliográficos
Autores principales:	Li, Yanping, Yan, Dazhou, Yang, Tao, Wen, Guosheng, Yao, Xin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2022
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8829944/ https://www.ncbi.nlm.nih.gov/pubmed/35155887 http://dx.doi.org/10.1021/acsomega.1c03998

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